Materials Science of Thin Films


This course is part of the UCLA Henry Samueli School of Engineering and Applied Science (HSSEAS) Master of Science in Engineering Online (MSOL) program.  It is available only to students pre-approved by HSSEAS.  See below for more information.


About this course:

MSE 223 Materials Science of Thin Films. (Instructor Dr. M. Goorsky and R. Sandhu) Lecture, four hours; outside study, eight hours. Requisites: courses 120, 131. Fabrication, structure, and proper¬ty correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading.

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